Legacy Semiconductor Equipment Support

Refurbishment, system sales, spares, upgrades, and technical support for production-critical legacy systems.

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Legacy Lam System
Specialists


30+ Years
Industry Experience


Production Critical
Support


Supporting Fabs Worldwide

Services

Our engineering team supports legacy semiconductor equipment, including Lam etch systems. From refurbishment and upgrades to field service and spare parts, we help extend tool life and maintain production reliability.

System Sales

Refurbished plasma etch systems supplied, configured and production ready with support to ensure the right system selection.

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Technical Support

Engineering and process support for troubleshooting, optimisation and maintaining uptime across legacy semiconductor equipment.

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Obsolescence

Solutions for legacy systems where OEM support has ended, including replacement components and upgrades to maintain continuity.

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Supply & Repair

Repair and refurbishment of legacy semiconductor parts to restore performance, reduce downtime and extend component life.

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Additional Equipment Support

Entrepix (Amtech) Support
Supporting CMP and Clean Systems

Support for Applied CMP and OnTrak Clean equipment.

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Need support for legacy semiconductor equipment?

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Supported Systems & Platforms

Extensive experience across established legacy Lam etch platforms and associated subsystems.
Platforms and systems we regularly support:

Legacy Lam Systems

Extensive hands-on experience supporting established legacy Lam etch platforms and associated subsystems within production environments.

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Production Support

On-site troubleshooting, preventative maintenance and engineering support focused on maintaining uptime and production continuity.

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Parts & Obsolescence

Sourcing, refurbishment and lifecycle extension support for legacy components where OEM support has reduced, changed or ended.

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About LegaTech

LegaTech was formed to provide specialist engineering support for legacy Lam equipment where deep platform knowledge is essential. We work directly with operations and engineering teams to maintain stability, extend asset life and protect production continuity.

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