Specialist support for legacy semiconductor equipment
Our engineering team supports legacy semiconductor equipment, including Lam etch systems. From refurbishment and upgrades to field service and spare parts, we help extend tool life and maintain production reliability.
We work directly with engineering and operations teams to deliver practical, production-focused solutions where OEM support has been reduced or is no longer available.
Why LegaTech
With over three decades of semiconductor equipment experience, LegaTech combines practical engineering expertise with deep knowledge of legacy Lam systems and associated platforms.
We understand the operational pressures faced by manufacturing teams where uptime, reliability, and precision are critical. Our focus is simple: deliver technically sound, production-ready solutions that protect performance and extend equipment life.
System Sales
Refurbished plasma etch systems supplied, configured and prepared for production. Solutions are aligned to operational requirements, with support to ensure the right system selection and readiness for installation.
Technical Support
Engineering and process support for troubleshooting, system optimisation and maintaining uptime across legacy semiconductor equipment, focused on practical, production-ready outcomes.
Upgrades & Obsolescence
Solutions for legacy systems where OEM support has reduced or ended, including component replacement and controlled upgrades to maintain production continuity and performance.
Parts Supply & Repair
Repair and refurbishment of legacy semiconductor parts, supported by an established supply chain to restore performance, reduce downtime and extend component life.
Equipment Support
Specialist support for Applied CMP and OnTrak Clean systems, including parts, spares, upgrades and field support, with broader technical support for legacy semiconductor equipment where required.
Why work with LegaTech
- Over 30 years of combined semiconductor equipment experience
- Engineering-led, practical support
- Focused on legacy and critical systems
- Flexible on-site and remote support
- Trusted by semiconductor manufacturing teams
Need support with legacy equipment?
Whether you need refurbishment, field support, or long term parts management, we are ready to support your team with practical, engineering-led solutions.