About LegaTech

LegaTech was founded in 2025 to support semiconductor manufacturing, specialising in legacy Lam etch systems. Based in Scotland, the company provides proven engineering support, system refurbishment, system sales and parts solutions to extend tool life and maintain production.

With over 30 years of combined engineering experience, LegaTech has helped more than 1,800 systems across 300+ global clients. The team focuses on keeping legacy etch platforms operational, delivering practical engineering support trusted by fabs worldwide.

Our focus

LegaTech exists to help semiconductor manufacturers get the most out of their legacy Lam Research etch systems. The team has decades of hands-on experience working with these tools, solving practical challenges in production environments.

Every system has its own complexities, and the focus is on keeping equipment running reliably. Whether troubleshooting performance issues, refurbishing tools, supplying parts, or supporting system upgrades, the goal is to maintain stable, efficient production for as long as possible.

What we deliver

LegaTech provides specialist support for legacy Lam etch systems, helping extend equipment life and maintain production performance.

Services combine practical engineering expertise with a focus on reliability, uptime, and cost-effective operation.

LegaTech also provides specialist support for Amtech systems, focused on CMP and clean processes across legacy equipment.

Our services include:

• Refurbishment and optimisation of legacy etch systems
• Expert fault diagnosis and repair
• System upgrades and control improvements
• Parts supply and obsolescence solutions
• Technical support and training

All work is focused on extending equipment life, reducing downtime, and supporting stable production over the long term.

How we work

LegaTech takes a practical, engineering‑led approach to every project. Work is carried out by experienced engineers with direct knowledge of the equipment and a focus on delivering reliable solutions.

The priority is keeping production stable and equipment performing at its full potential. Solutions are tailored to each operating environment, built on proven methods, and supported by clear communication.

Whether supporting maintenance, system refurbishment, or troubleshooting, the focus is on delivering consistent, measurable results.

Why it matters

Legacy etch systems remain essential to many semiconductor operations, and replacing them is rarely straightforward. These tools often have years of service remaining but can be affected by parts shortages, ageing controls, and increasing maintenance demands.

LegaTech helps manufacturers maximise the value of existing systems by improving reliability, extending uptime, and reducing operating costs. Supporting and upgrading legacy equipment helps preserve capital investment and maintain production continuity.