Parts Supply & Repair

Semiconductor parts supply

Semiconductor parts sourcing and supply, including OEM and second source components for legacy systems.

Customer repair program

LegaTech supports customer-owned semiconductor parts through assessment, repair, and controlled refurbishment loops, restoring performance and extending component life.

Our programs are designed to improve reliability, reduce downtime, and provide a consistent, repeatable approach to maintaining critical semiconductor spares across legacy systems.

Semiconductor equipment interface module with multiple channel connections and power input

Why parts & obsolescence matters

Legacy equipment doesn’t stop being critical when OEM support ends.

As parts become obsolete and lead times increase, maintaining uptime becomes more challenging and risk to production increases.

Without a clear strategy in place, this can lead to unplanned downtime, reduced performance, and operational disruption.

What we support

Component Sourcing

Access to a wide network of parts suppliers and legacy inventory to locate hard-to-find components.

Repair & Refurbishment

Extending the life of existing parts through specialist repair, rebuild, and refurbishment processes.

Obsolescence Support

Helping plan ahead to reduce risk and maintain system uptime as components reach end-of-life.

How we help

  • Identify critical and at-risk components
  • Source new or alternative parts
  • Repair and return existing components
  • Build buffer stock where required
  • Reduce reliance on OEM supply
  • Support long-term maintenance planning

Why LegaTech

With decades of Lam etch experience, our team understands the realities of maintaining legacy equipment in production environments.

We take a practical, engineering-led approach. Not just supplying parts, but helping you keep systems operational for longer.

Need support with parts or obsolescence?

Speak to our engineering team to discuss your system and requirements.