Specialist equipment support for Applied CMP and OnTrak Clean.
LegaTech provides specialist equipment support across the UK, Ireland and Nordic region for Entrepix (Amtech) supported products.
Our scope includes system sales, field support, spares and upgrades alongside broader technical support for legacy semiconductor systems where required.
Why it matters
As equipment ages and OEM support becomes more limited, maintaining stable, and reliable processing capability becomes more challenging.
Access to a specialist engineering partner helps simplify support, reduce downtime and ensure critical systems continue to operate effectively.
What we support
Amtech support
Support focused on CMP and clean-related processes, including parts, spares and consumables, refurbishment and ongoing operational support.
Entrepix systems
Support across CMP and related process equipment, including parts, upgrades and consumables for 200mm and 300mm applications where required.
Extended capabilities
Additional support through specialist partners, including field support for hardware and process requirements, and chemical development via Intersurface Dynamics.
Support capabilities
- CMP parts, spares and consumables
- Clean and reusable parts
- Parts sourcing and supply
- Refurbishment and repair
- Hardware and process support
- Field support
- Training
- Chemical development via Intersurface Dynamics
Why LegaTech
We provide practical, engineering-led support across CMP and legacy semiconductor equipment, helping customers manage ageing systems with less complexity and greater confidence.
Our focus is on responsive support, strong technical understanding and maintaining operational continuity where parts, service and expertise are becoming harder to access.
Need equipment support?
Speak to LegaTech about parts, refurbishment, training or field support.